Extended Abstracts for AVEM Seminars
Behavior of Vacuum Equipment within Radioactive and Magnetic Environments
Dieter Mueller, Leybold Vacuum, Cologne, Germany
Overview of Applications of Vacuum Technology Required for the World’s most Powerful Laser System - NIF
Peter Biltoft, Lawrence Livermore National Laboratory, Livermore, CA
How to Choose the Right Vacuum Gauge
Jerry Juarez, Brooks Automation, Granville-Phillips Products, Longmont, CO
A Year in Review for the Semiconductor Equipment and Materials Market and Trends Moving Forward
Lara Chamness, Semiconductor Materials and Equipment International (SEMI), San Jose, CA
Slide presentation.
Front End Process Directions in the 2005 ITRS
Larry A. Larson, SEMATECH, Austin, TX
Slide presentation.
EUV Lithography: Vacuum Challenges
Paul Blackborow, Energetiq Technology, Inc., Woburn, MA
What Makes a Vacuum Product Successful?
Gerardo A. Brucker, Stanford Research Systems, Inc., Sunnyvale, CA
Forecast of the Next Turning-Point in Demand for Equipment Components
Moshe Handelsman and Rosa Luis, Advanced Forecasting, Cupertino, CA
Quadrupole Mass Spectrometry Applications in Residual Gas Analysis and Production Control for Semiconductor Processing and Fabrication
Mark Buckley, Hiden Analytical Inc., Plymouth, MI
State of the Art and Industry Demands for Magnetron Sputter Technologies
Dermot Monaghan, Gencoa Ltd.
The Semiconductor Manufacturing Industry
Current Status and Future Outlook
Lubab Sheet, Semiconductor Equipment and Materials International (SEMI)
Vacuum Equipment in the Data Storage Industry
Dr. Art Wall, Hitachi Global Storage Technologies
Pressure & Residual Gas Control In Plasma!
Harry Grover, MeiVac Inc. and Nir GurArye of Ricor
The Semiconductor Industry: Current Status and Future Outlook
Lubab Sheet, Semiconductor Equipment and Materials International (SEMI)
Working Under Pressure: the Promise of Supercritical Co2 Fluids for Microelectronic Applications
Chris Case, BOC Edwards
Designing for Optimum Dynamic Performance in Vacuum Environments
Kenneth J. Christensen, Motion in Vacuum
Recent Technical Advances in Pulsed Laser Deposition (PLD)
Tetsuo Ishida, Vacuum Products Corporation
International SEMATECH and its approach to New Transistor Materials and Device Directions
Larry Larson, SEMATECH
Opening Remarks by the AVS President-Elect:
Paddling Upstream
Rudy Ludeke, IBM T.J. Watson Research Center
Japanese Vacuum Industry Trends and JVIA Activities
Tadeo Sumi, Chairman, Japan Vacuum Industry Association (JVIA), and President, Shibaura Mechatronics Corporation
Semiconductor Capital Equipment Trends and Outlook
Elizabeth Schumann, Director, Industry Research and Statistics, SEMI
Cathodic Arc Plasma Deposition: Principles and Trends
André Anders, Lawrence Berkeley National Laboratory, University of California, Berkeley, CA
Innovative Trends in Selective Pumping
Lawrence T. Lamont, Jr., Cougar Labs, Inc., Fremont, CA
The Perils of "Double Bookings"
The presentation of Dr. Moshe Handelsman at AVEM (Oct. 30, 2001) was based on the following article.
Opening Remarks by the AVS President-Elect
Bruce D. Sartwell, Naval Research Laboratory
Advances in Uncooled Thermal Imaging and the Need for High-Throughput Vacuum Packaging
S. Jamison, K. Galli, and K. Ryan, Sanders IR Imaging Systems
Automated Fabrication of OLED Flat Panel Displays
T. K. Hatwar and G. Rajeswaran, Display Technology Laboratory, Eastman Kodak Company
Advanced Applications of Ion Implantation and Their Impacts on Vacuum Technology
L. Rubin, Axcelis Technologies
Lean Thinking for the Vacuum Industry
J. P. Womack, The Lean Enterprise Institute
Performance Limits in Gigascale Interconnect Schemes—Challenges and Potential Solutions
Alain E. Kaloyeros, Michael Belyansky, James Castracane, Katherine Dovidenko, Eric T. Eisenbraun, Robert Geer, Serge Oktyabrsky, John Welch, and Di Wu, UAlbany Institute for Materials and the Physics and Chemistry Departments, The University at
Albany-SUNY
The Present Status and Future of the Japanese Vacuum Equipment Market
Shunji Nishihira, Chairperson, Japan Vacuum Industry Association (JVIA)
Market Segment Focus—OEM/End-User in the Analytical Instrument Industry
Gregory Wells, Varian Analytical Instruments, Varian Inc.
Market Segment Focus—Industrial Optical Coating Industry
Russell J. Hill and Gregg Wallace, BOC Coating Technology
Market Segment Focus—Data Storage Industry
Andrew C. Walker, IBM Storage Systems Division
Market Segment Focus—Flat Panel Display Industry
J. Norman Bardsley, Lawrence Livermore National Laboratory and the United States Display Consortium
Message from the 1999 AVS President-Elect
Paula Grunthaner, Jet Propulsion Laboratory
1998 AVEM Fall Seminar
Market Overview of the Semiconductor Equipment and Materials Industry
and the Impact of Globalization,Victoria Hadfield, Vice President, Public Policy and North America, SEMI
Evolution of the Vacuum Industry: The Shift From Components to Subsystems, Christopher Moody, Senior Vice President, Helix Technology Corporation
IC Price "Deflation" Staggers 1998 Semiconductor Market, Bill McClean, President, IC Insights, Inc.
Semiconductor Support: The Times Have Changed, James E. White, Global Logistics Manager,
Varian Semiconductor Equipment Customer Support
1997 Fall AVEM Seminar
The Coming Revolution in IC's: Intelligent, Integrated Microsystems, A.D. Romig, Jr.; Director, Microelectronics and Photonics, and J.H. Smith; Team Leader, Intelligent Micromachine Technology, Sandia National Laboratories
Smarter Tools by Design,Alexander M. Voshchenkov, Chief Technical Officer, Lam Research Corporation
IC Defects and Future Vacuum Needs for the Semiconductor Industry, Sattar Allami, Section Head, Thin Film Department, Integrated Device Technology
Compacted Change in Interconnect Technology and its Implications for Vacuum Equipment Manufacturers, Ron Dornseif, Dataquest, Semiconductor Equipment, Manufacturing and Materials Service
Semiconductor Equipment Industry in 1996 and Beyond, Richard Greene, SEMI
Less is More - some IC, Process and Equipment Trends, Christopher Case, Lucent Technologies
Paradigm Shifts and Economies of Scale in the 300mm Semiconductor Equipment Markets, Charles M. McKenna, Varian Ion Impant Systems
AVS - Contributions to the Semiconductor Industry, William D. Sproul, BIRL Northwestern University
Vacuum Pumping Trends in the Semiconductor Industry, Alan P. Troup & Stephen Kew, The BOC Group
Present and Future Trends of the US Vacuum Industry, Joel McFadden, Stokes Vacuum, Inc.
Life Beyond Semiconductors, William D. Sproul, BIRL, Northwestern University
Equipment Needs for Future Generations of Flat Panel Displays, Todd Yuzuriha, Sharp Microelectronics Technology, Inc.
Vacuum Applications in the Manufacture of Liquid Crystal Displays, Mark Fochs, Standish Industries, Inc.
Cost Considerations in Active Matrix Liquid Crystal Displays, Kenji Miyata, Hitachi Ltd., Japan
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