The AVEM Newsletter, Spectrum publishes the extended abstracts of the presentations at the AVEM Annual Fall Seminar. Other features of the newsletter include the following: the "President's Corner" - message from the AVEM President; Vacuum Industry News, the latest Web Site features, and Career/Advertising Opportunities.

The 2000 Spring issue of Spectrum contains the extended abstracts of presentations at the 1999 AVEM Fall Seminar on “Roadmap to the New Millennium”

The 1999 Spring issue of Spectrum contains the extended abstracts of presentations at the 1998 AVEM Fall Seminar on “Global Technology and Market Trends for the Semiconductor Industry”

The 1998 Spring issue of Spectrum contains the extended abstracts of presentations at the 1997 AVEM Fall Seminar on " Meeting the Future Vacuum Equipment Needs of the Semiconductor Industry"

The 1997 Spring issue of Spectrum contains the extended abstracts of presentations at the 1996 AVEM Fall Seminar on "Semiconductor Industry and Processing Trends ... implications for vacuum equipment and process design."

The 1996 Spring issue of Spectrum contains the extended abstracts of presentations at the 1995 AVEM Fall Seminar on "Flat Panel Displays."

2000 Spring Spectrum

This issue of Spectrum highlighted extended abstracts of presentations from the 1999 AVEM Fall Seminar on “Roadmap to the New Millennium"

The 1999 AVEM International Fall Seminar held in Seattle during the 46th American Vacuum Society International Symposium adopted a new format. A series of speakers—experts from several key vacuum equipment market segments—provided an overview as to the needs of their industry for vacuum equipment, today and for the future. They provided a profile of their market segments, including historical and projected growth potentials, and insights into significant changes that they saw coming for the vacuum equipment that is used in their processes.

As we move into the 21st century, it is critical for vacuum equipment manufacturers to develop a clear and consistent direction for their companies to follow in supporting the markets they serve. Diversification of the customer base is a key component to success.
It is likely that this highly successful seminar focus will be continued for the next seminar to be held in Boston on October 3, 2000. Members and non-members are invited to send their "wish-list" of topics that they would like to see addressed this year to AVEM. The AVEM International 2000 Fall Seminar Committee welcomes your ideas—please send comments to <aveminfo@avem.org>.

Top-level executives of vacuum equipment manufacturing companies and users in the industry gathered to hear the presentations at the seminar in Seattle. Opening remarks by Peter Frasso, President of AVEM International, were followed by a presentation by Paula Grunthaner, President-Elect of the American Vacuum Society.

For the benefit of those individuals who were unable to attend the seminar, this issue of Spectrum contains a summary of Paula Grunthaner’s Welcoming Remarks, together with extended abstracts of the following presentations. A presentation on “The Present Status and Future of the Japanese Vacuum Equipment Market” by Shunji Nishihira, Chairman, Japan Vacuum Industry Association (JVIA) and President of Anelva Corporation was followed by a series of presentations which provided a vacuum equipment roadmap for different market segments. The Industrial Optical Coating industry was addressed by Russell J. Hill, BOC Coating Technology; the Analytical Instrumentation OEM/End-user industry was addressed by Gregory Wells, Varian, Inc.; the Hard Drive/Memory Coating industry was addressed by Andrew C. Walker, IBM Corporation; the Flat Panel Display industry was addressed by Norman Bardsley, United States Display Consortium and LLNL; and the Semiconductor End-User industry was addressed by Christopher Case, formerly of Lucent Technologies.

AVEM International would like to acknowledge the hard work of Don Croteau, Nu Vacuum and Vivienne Harwood Mattox, AVEM Executive Secretary, in putting together this outstanding
seminar.

Extended Abstracts

The Present Status and Future of the Japanese Vacuum Equipment Market
Shunji Nishihira, Chairperson, Japan Vacuum Industry Association (JVIA)

Market Segment Focus—OEM/End-User in the Analytical Instrument Industry
Gregory Wells, Varian Analytical Instruments, Varian Inc.

Market Segment Focus—Industrial Optical Coating Industry
Russell J. Hill and Gregg Wallace, BOC Coating Technology

Market Segment Focus—Data Storage Industry
Andrew C. Walker, IBM Storage Systems Division

Market Segment Focus—Flat Panel Display Industry
J. Norman Bardsley, Lawrence Livermore National Laboratory and the United States Display Consortium

Message from the 1999 AVS President-Elect
Paula Grunthaner, Jet Propulsion Laboratory

1999 Spring Spectrum

This issue of Spectrum highlighted extended abstracts of presentations from the 1998 AVEM Fall Seminar on “Global Technology and Market Trends for the Semiconductor Industry"

The topic of “Global Technology and Market Trends for the Semiconductor Industry” was the central theme of the 1998 AVEM Fall Seminar, which was held during the 45th International Symposium of the American Vacuum Society in Baltimore, MD. Top-level executives of vacuum equipment manufacturing companies and users in the industry gathered to hear the presentations. Opening remarks by Peter Frasso, President of AVEM, were followed by a presentation by Stephen Rossnagel, President-Elect of the American Vacuum Society.

For the benefit of those individuals who were unable to attend the seminar, this issue of Spectrum contains a summary of Stephen Rossnagel’s Welcoming Remarks, together with extended abstracts of the following interesting presentations: “The Globalization of the Semiconductor Industry and the Outlook for Equipment Suppliers” by Victoria Hadfield, SEMI; “This IC Industry Cycle is the Same, but Different” by Bill McClean, IC Insights, Inc.; “New Service Requirements for a ‘Globalized’ and More Competitive Industry” by James White, Varian Semiconductor Equipment Customer Support; and “Evolution of the Vacuum Industry: The Shift from Components to Subsystems” by Christopher Moody, Helix Technology Corporation.

Extended Abstracts

Market Overview of the Semiconductor Equipment and Materials Industry
and the Impact of Globalization,Victoria Hadfield, Vice President, Public Policy and North America, SEMI

Evolution of the Vacuum Industry: The Shift From Components to Subsystems, Christopher Moody, Senior Vice President, Helix Technology Corporation

IC Price “Deflation” Staggers 1998 Semiconductor Market, Bill McClean, President, IC Insights, Inc.

Semiconductor Support: The Times Have Changed, James E. White, Global Logistics Manager,
Varian Semiconductor Equipment Customer Support

This issue of Spectrum highlighted extended abstracts of presentations from the 1997 AVEM Fall Seminar on "Meeting the Future Vacuum Equipment Needs of the Semiconductor Industry"

The topic of "Meeting the Future Vacuum Equipment Needs of the Semiconductor Industry" was the central theme of the 1997 AVEM Fall Seminar, which was held during the 44th National Symposium of the American Vacuum Society in San Jose, CA. Top-level executives of vacuum equipment manufacturing companies and users in the industry gathered to hear the presentations. Opening remarks by Peter Frasso, President of AVEM were followed by a presentation by Jerry M. Woodall, President-Elect of the American Vacuum Society. For the benefit of those individuals who were unable to attend the seminar, this issue of Spectrum contains a summary of Jerry Woodall's Welcoming Remarks, together with extended abstracts of the following interesting presentations: "The Coming Revolution in IC's: Intelligent, Integrated Microsystems" by Alton D. Romig, Jr., Sandia National Laboratories; "Smarter Tools by Design" by Alexander M. Voshchenkov, Lam Research Corporation; "Compacted Change in Interconnect Technology and its Implications for the Vacuum Equipment Manufacturers" by Ron Dornseif, Dataquest; and "IC Defects and Future Vacuum Needs for the Semiconductor Industry"" by Sattar Allami, Integrated Device Technology. The seminar concluded with a lively Panel Discussion. All the speakers participated in the Panel Discussion which was moderated by Seminar Program coordinator, Robert Adams, BOC Edwards.

Extended Abstracts

The Coming Revolution in IC's: Intelligent, Integrated Microsystems, A.D. Romig, Jr.; Director, Microelectronics and Photonics, and J.H. Smith; Team Leader, Intelligent Micromachine Technology, Sandia National Laboratories

Smarter Tools by Design,Alexander M. Voshchenkov, Chief Technical Officer, Lam Research Corporation

IC Defects and Future Vacuum Needs for the Semiconductor Industry, Sattar Allami, Section Head, Thin Film Department, Integrated Device Technology

Compacted Change in Interconnect Technology and its Implications for Vacuum Equipment Manufacturers, Ron Dornseif, Dataquest, Semiconductor Equipment, Manufacturing and Materials Service

1997 Spring Spectrum

This issue of Spectrum highlighted extended abstracts of presentations from the 1996 AVEM Fall Seminar on "Semiconductor Industry and Processing Trends .... implications for vacuum equipment and process design"

The topic of Semiconductor Industry and Process Trends was the central theme of the Fall 1996 AVEM Seminar, which was held during the 43rd National Symposium of the American Vacuum Society in Philadelphia. Top-level executives of vacuum equipment manufacturing companies and users in the industry gathered to hear the presentations. Opening remarks by Joel McFadden, President AVEM were followed by a presentation by William D. Sproul, President AVS, titled "The AVS - Contributions to the Semiconductor Industry." For the benefit of those individuals who were unable to attend the seminar, this issue of Spectrum contains the extended abstracts of William Sproul's presentation together with extended abstracts of the following interesting presentations: "The Semiconductor Equipment Industry in 1996 and Beyond" by Richard Greene, SEMI; "Less is More - Can Semiconductor Equipment Suppliers meet the Economic and Technical Challenge of Future IC's?" by Christopher Case, Lucent Technologies - Bell Lab Innovations; "Paradigm Shifts and Economies of Scale in the 300mm Semiconductor Equipment Market" by Charles M. McKenna, Varian Ion Implant Systems; and "Vacuum Pumping Trends in Semiconductor Processing" by Alan P. Troup, The BOC Group.

The seminar concluded with a lively Panel Discussion on the "Future Trends and Needs of the Semiconductor Industry." All the speakers participated in the Panel Discussion which was moderated by Seminar Program coordinator, Robert Adams, Edwards High Vacuum International.

Extended Abstracts

Semiconductor Equipment Industry in 1996 and Beyond, Richard Greene, SEMI

Less is More - some IC, Process and Equipment Trends, Christopher Case, Lucent Technologies

Paradigm Shifts and Economies of Scale in the 300mm Semiconductor Equipment Markets, Charles M. McKenna, Varian Ion Impant Systems

AVS - Contributions to the Semiconductor Industry, William D. Sproul, BIRL Northwestern University

Vacuum Pumping Trends in the Semiconductor Industry, Alan P. Troup & Stephen Kew, The BOC Group

Present and Future Trends of the US Vacuum Industry, Joel McFadden, Stokes Vacuum, Inc.

1996 Spring Spectrum

The 1996 Spring issue of Spectrum focused on a review of the AVEM 1995 Fall Seminar on "Flat Panel Displays .... a Challenge for the Vacuum Industry"

The topic of Flat Panel Displays was the central theme of the Fall 1995 AVEM Seminar, which was held during the 42nd National Symposium of the American Vacuum Society in Minneapolis. Attendance at the seminar exceeded that of all previous years, as top-level executives of the major vacuum equipment manufacturing companies gathered to hear experts talk about the developments needed within the vacuum equipment industry to enable the Flat Panel Display (FPD) industry to produce displays with greater performance and functionality, at prices consumers are willing to pay. A welcome was first extended by AVEM President Joel McFadden to all seminar attendees, and especially to a delegation of executives from the Japanese Vacuum Industry Association (JVIA). Dr. Saburo, President JVIA, presented some opening remarks on behalf of his associates. These opening remarks were followed by a perspective on the Flat Panel Display Industry by William D. Sproul, Vice President AVS, titled "Life Beyond Semiconductors."

For the benefit of those individuals who were unable to attend the seminar, this issue of Spectrum contains the extended abstracts of the following interesting presentations: "Equipment Needs for Future Generations of Flat Panel Displays" by Todd Yuzuriha, Sharp Microelectronics Technology, Inc.; "Vacuum Applications in the Manufacture of Liquid Crystal Displays" by Mark Fochs, Standish Industries, Inc.; and "Cost Considerations in Active Matrix Liquid Crystal Displays" by Kenji Miyata, Hitachi Ltd., Japan.

The need to increase production and decrease unit costs in the flat panel display business will require major changes in production equipment. Even though the equipment will be based on existing IC manufacturing technology, the need to process large size substrates will place new demands on OEM suppliers. The presentation by Joseph Stach, RF Power Products, Inc., titled "Equipment Trends in FPD Manufacturing," emphasized the fact that interfacing production processes, and the need for team efforts for developing new equipment and processes, will place new demands on equipment manufacturers.

Flat panel display production requires the use of large substrates (> 550mm x 650mm) and this requirement will mean that new equipment will have to be designed to provide the product throughput and yield necessary for cost-effective production. A presentation by Aitor Galdos and Jacques Schmitt, Balzers Process Systems, titled "Large Sized Glass Coating for Flat Panel Display Applications" addressed the equipment needs for handling the large glass substrates needed for FPD production. The optimal design for such equipment has not yet been identified.

The seminar concluded with a lively Panel Discussion on the "Future Trends and Needs of the Flat Panel Display Industry." All the speakers participated in the Panel Discussion which was moderated by Dr. M. Robert Pinnel, Chief Technical Officer, United States Display Consortium.

Extended Abstracts

Life Beyond Semiconductors, William D. Sproul, BIRL, Northwestern University

Equipment Needs for Future Generations of Flat Panel Displays, Todd Yuzuriha, Sharp Microelectronics Technology, Inc.

Vacuum Applications in the Manufacture of Liquid Crystal Displays, Mark Fochs, Standish Industries, Inc.

Cost Considerations in Active Matrix Liquid Crystal Displays, Kenji Miyata, Hitachi Ltd., Japan