BROOKS AUTOMATION, INC.Web Site http://www.brooks.com
Company Profile
Brooks Automation is the global leader in the development and application of innovative vacuum technology solutions. Through our CTI-Cryogenics®, Granville-Phillips®, and Polycold® Systems Product Centers, we provide a broad range of critical vacuum components, controls and subsystems that are key to the performance of semiconductor, flat panel and disk drive manufacturing equipment. Brooks GOLDLink® Support uses remote diagnostic monitoring of vacuum systems to expand our highly regarded GUTS® Support and On-Board® information solutions to create a virtual presence in fabs throughout the world. Brooks solutions such as the TrueBluesm Service Agreements eliminate unscheduled downtime and deliver unmatched uptime support.
Product Lines
Products, Services and Markets
The CTI-Cryogenics Product Center serves a variety of processing equipment OEM and end-user markets with field-proven cryogenic pumps for the production of high vacuum as well as water vapor pumping applications. Both pump types include our unique microprocessor-based pump control system which gives users unparalleled capabilities to optimize performance and uptime. CTI-Cryogenics products fill critical needs in numerous high-vacuum pumping applications, including thin-film deposition, ion implantation and, more recently, etch systems. Typical applications include the manufacture of semiconductors, flat panel displays, magnetic recording heads, disk drives, CD-ROMs and optics. The Granville-Phillips Product Center designs, manufactures and markets instrumentation to provide reliable and repeatable vacuum measurement solutions that help increase vacuum process productivity. For over 30 years the name has been recognized as a leader in supplying gauging instrumentation of exceptional quality. The Granville-Phillips line spanning the pressure range from 5 X 12–12 Torr to 1000 Torr, is the industry’s standard for both reliability and performance and are found throughout manufacturing facilities, research centers and major universities worldwide. Polycold® Systems is the global leader in cryogenic refrigeration systems, serving a broad variety of customer requirements in the temperature range of -203°C to -90°C. The Polycold® Systems product line includes fast cycle water vapor cryopumps, cryocoolers to chill cold traps, baffles, and detectors, and refrigeration systems that chill gas streams for the cooling of wafers or chucks in semiconductor process tools. Polycold products provide the performance, reliability, and durability that OEMs and end-users rely upon around the world, around the clock.
Company Key Products On-Board® Cryopumps – lead the industry in performance and productivity, combining the unique benefits of our On-Board Control System with the industry’s most reliable cryopump ensuring high product yields and process throughput. Polycold® PFC Fast Cycle Water Vapor Cryopumps – significantly reduce pumpdown time and improve product quality due to the rapid removal of water vapor from the vacuum process. On-Board® Waterpumps provide improved capabilities, reliability, and economics for water vapor pumping, as compared to traditional methods. AquaTrap® Waterpumps offer supplementary water vapor cryopumping for turbopumps. STABIL-ION® Vacuum Measurement System – The new technology plus controlled, precision manufacturing techniques result in a gauge that can provide accurate real time readout of pressure, as well as stable, repeatable, reproducible process control. MICRO-ION® Vacuum Measurement System – Features complete high vacuum measurement and takes less space than a traditional glass ionization gauge by itself. Compact Modules are an ideal solution for applications that do not need front panel displays and controls. CONVECTRON® Vacuum Gauges – Designed to improve productivity in applications from atmosphere to 10-4 Torr. Stability and excellent repeatability help reduce product defects and downtime caused by gauges prone to calibration drift. TrueBluesm Service Agreements offer value-added service offerings focused on improving performance and maximizing productivity for vacuum systems.