Denton Vacuum, LLC

DENTON VACUUM, LLC

1259 N. Church Street, Moorestown, NJ 08057
Phone: 856-439-9100/Fax: 856-439-9111
Email: info@dentonvacuum.com

Rod Moore: President
James Colbridge: Sales Manager
John Crowe: Sales Engineer

Web Site: http://www.dentonvacuum.com

Company Profile

Denton Vacuum is an organization based on and driven by process know-how and system engineering skills. Denton’s 130+ man-years of process engineering expertise in evaporation, sputtering, ion-assisted processes, and plasma-enhanced chemical vapor deposition (PECVD) is the foundation on which the company has been built. Process know-how is delivered to Denton’s customer base through state-of-the-art controls and automation that in turn, drive best-in-class hardware/subsystems on a customer-specific system design. This skill set allows Denton Vacuum to analyze the unique and exacting product requirements of each customer and provide a specific, high yield process solution on a robust, high-uptime platform.

Product Lines

Electron Beam Deposition
Resistance/Thermal Deposition
Sputtering
Ion Beam Deposition & Etch
PECVD
Microscopy/Sample Preparation

Products, Services and Markets

Denton Vacuum designs and manufactures systems to deposit ultra-thin metallic and dielectric coatings. These coatings are used in industrial and research applications ranging from optics, semiconductors, electro-optics, display, tribology, medical devices, to telecommunications.

Denton’s ongoing support, service and training ensure trouble-free operation. We currently have full-time field service engineers dedicated to domestic customer support as well as additional full-time field representatives in Europe and China. In addition to our impeccable customer service, we offer a multitude of spare parts and fast delivery to meet the needs of our valued customers. These efficiencies are paramount in maintaining Denton’s leadership role in the global marketplace.

Company Key Products

Electron Beam Deposition:

Integrity^® -These systems range in size from 26” to 80” and all utilize evaporation technology as the deposition modality.
Explorer^® - can be configured for thermal evaporation, electron beam evaporation, multi-cathode sputtering and PECVD.

Ion Beam Deposition & Reactive Ion Etching:

NEW!! Discovery HDG -a complete, turnkey system that offers all the features and versatility needed for wide ranging development and production applications.

Resistance/Thermal Deposition:

Integrity^® - see above description
Explorer^® - see above description
Bench Top Turbo^®-Denton’s table-top high vacuum sample preparation system. Features include fully automatic processing, support for thermal evaporation and sputtering modalities.

Sputtering:

Discovery^® -Utilizing a unique orientation of the sample to the sputtering sources, Discovery^® systems can process relatively large samples and achieve remarkable thickness uniformity using small sputtering sources.
Explorer^® - see above description
Desk^® -simple mechanically pumped configuration for sputtering of noble metals or carbon evaporation.

PECVD:

Voyager^® - Designed to meet the thin film industry’s requirements for conformal coatings, low temperature processing and high intrinsic uniformity, the Voyager offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.

Microscopy Sample Preparation:

Desk^® - see above description
Bench Top Turbo^® - see above description

Explorer^® for Microscopy - High purity ultra thin chromium films can routinely be generated for high resolution microscopy.