3470 Mainway, Burlington, Ontario, L7M 1A8, Canada
905/335-7022 Fax 905/335-3506
800/268-4980 E-mail juvinfo@ultrahivac.com

Ole Johnsen, President
Hans de Jong, Manager, Sales & Marketing
Mike Nagy, Engineering Manager

Web Site http://www.ultrahivac.com

Company Profile

Johnsen Ultravac Inc, (JUV) a Burlington Ontario based company, is a Canadian based manufacturer of high vacuum and ultra high vacuum deposition systems, instruments, chambers and custom designed vacuum products. Our Engineering Staff has the expertise to come up with creative solutions that will meet, but likely exceed the most complex requirements.

Typical JUV vacuum products include pumping stations for the Nuclear Power plants; space simulation systems for low temperature research and testing; and a wide range of synchrotron and beam line components such as photon shutter assemblies, beam stops and monochromators.

JUV designs and manufactures standard and one-of-a-kind vacuum chambers for space simulation research, surface analysis, and coatings. The JUV vacuum chamber manufacturing process eliminates the possibility of virtual leaks and ensures vacuum performance, with metal sealing gaskets, to less than 5 x 10^-11 Torr after bake-out.

All our products are manufactured and tested in Burlington, a city strategically located between Toronto Canada and Buffalo, NY with convenient access by car and air. The company has representation is the USA, Western Europe, Israel, India, China, Taiwan and Japan.

Product Lines

• Batch (common in & out load lock) systems
• Batch (one chamber) systems
• Substrate heaters
• Cluster tool (multiple chamber, random access)
• Electron beam melting systems
• Equipment design services
• Ion Beam Assisted Deposition systems
• Laser ablation systems
• Molecular Beam Epitaxy (MBE)
• Space simulation systems
• Sputter deposition systems
• Ultrahigh vacuum systems
• Beam line components
• Front-ends
• End stations
• Monochromators

Products, Services and Markets

Johnsen Ultravac specializes in custom designed uhv production tools based on the series 6000 such as Sputter deposition systems for batch processing of millimeter sized crystals, ECR/CVD systems for two faceted optical coatings of LASER bars, E-Beam evaporation systems for SAW devices.

Common features of the series 6000 include: uhv base pressure, high throughput, small system foot print, user friendly, rugged and reliable. Vacuum and process automation available as option.

Typical processes include:

• Multi layered sputtering deposition, < 1% deposition uniformity for 6" wafer available on request
• E-beam Evaporation systems, uniformity rating 3" dia wafers @ 0.1% at 10,000 Angstroms AL with JUV planetary assembly, high throughput with split-level process chamber
• ECR/CVD systems for optical coatings of two faceted LASER Bars, throughput up-to 1,500 bars per batch

Johnsen Ultravac offers the widest range in uhv sample manipulation devices, from one axis of motion to 6-axis of motions. Applications include sample transfers and position of cryostats and surface analysis probes. If linear motion is of interest the standard Z travel of series 2000 is available with maximum 72" (1,825 mm) of travel, longer travel on request. For customers requiring accurate positioning of heavy payloads, the 4000 series pay-;load capacity is maximum 500 lbs (225 kg). The 4000 series is available as an Z stage only or with XYZ travel. The 4000 series is also ideal for application requiring up-to +/- 100 mm of X & Y motion. For surface analysis model 3000 XYZ manipulator is available with a wide range of motions, up-to 6-axis of sample manipulation plus heating and cooling options. Sample holder stages are available with: +/- 180 degrees polar rotation; +/- 180 degrees azimuthal rotation; +/- 30 degrees tilt; Heating to 1,200 K, higher without cooling; Cooling to 10K range.

JUV chambers are available for applications requiring up to 900°C temperature range, with water cooling using double walls or channels and with integral continuous soft-bake out. New for 2003 are Aluminum chambers machined from a solid block of material. For customers in the Synchrotron community our products include plane grating monochromators, mirror manipulators and vessels, photon shutter and safety shutter assemblies. Complete range of beamline products on request.