10 Volvo Drive, Rockleigh, NJ 07647
201/784-5005 Fax 201/784-0202
E-mail sales@kdf.com
Kurt Flechsig, President
John Dickson, Vice President
Todd Plaisted, Director of Marketing
Rich LaCava, Director of Operations
Company Profile
KDF Electronic & Vacuum Services, Inc. serves the front-end processing sector of the semiconductor market. KDF produces inline-sputtering tools for the mainstream silicon, emerging materials and flat-panel display markets. With hundreds of systems shipped to fabs worldwide, KDF is aggressively committed to delivering the most advanced systems at the industry’s lowest cost of ownership. KDF is also dedicated to providing superior customer satisfaction – working with existing, new and potential customers to better understand their processing needs and requirements.
Product Lines
Products, Services and Markets
KDF systems are used in the production of ink jet printers, photomasks, telecommunications networks, semiconductors, micro-machines and others. KDF provides a re-engineered new inline system platform that incorporates state-of-the-art graphical computer control and intelligent peripheral components. KDF is determined to add longevity to batch systems, supplying an extensive inventory of replacement parts, sputter targets and field service to more than 3,000 systems worldwide. Being that KDF had purchased all MRC [Materials Research Corp.] inline tool rights we continue to support the older tools, by supplying updates and retrofit kits.
KDF is the only original OEM for all MRC inline tools. From inset cathodes to o-rings KDF can supply you with the parts you need.
KDF offers an unlimited selection of high purity metals, alloys, non-metallic and cermets for virtually every sputtering and evaporation application in the industry. KDF’s manufacturing facility is setup for production quantities, but can also produce small, research quantities at competitive prices. KDF stocks backing plates for immediate delivery requirements; also custom manufactured backing plates can be machined to meet current system specifications.
KDF has advanced metallic bonding techniques for targets, which guarantee that the highest thermal, electrical, and adhesive characteristics can be achieved.
Company Key Products
KDF NT In-Line Sputtering Systems offer advanced mechanical and electrical design features that result in tight process control, high reliability and extremely low defect rates. The systems incorporate magnetron sputtering for higher deposition rates, better uptime and longer target life. Reactive sputtering is utilized for optimum deposition of barrier and resistor films. KDF has a large array of newly designed cathodes that can help you achieve your goals. KDF ‘s unique dual-level, load-lock design provides built-in high productivity and increased throughput. It enables efficient uninterrupted, simultaneous loading/unloading of one set of substrates, while a second set is being coated in the process chamber.
900 Series — 12.5” x 12.25” pallet
600 Series — 13” x 13” pallet
700 Series — vertical in-line system with a pallet area of 19” x 19”
800 Series — 26.5” x 26.5” pallet area
Sputtering targets, Evaporation materials, Backing plates, Bonding services, and Re-manufactured 600/900 Series of systems