MKS INSTRUMENTS, INC.2
Tech Drive, Suite 201, Andover, MA 01810
978/645-5500 Fax 978-557-5100
800/227-8766
E-mail mks@mksinst.com
John R. Bertucci, Chairman of the Board
Leo Berlinghieri, Chief Executive Officer and President
Web Site http://www.mksinst.com
Company Profile
MKS Instruments is a leading global developer and manufacturer of instruments, components and subsystems that measure, control, power, monitor and manage critical processes in advanced manufacturing environments such as semiconductor, flat panel display, data storage, medical imaging equipment, biopharmaceutical and optical. MKS has extensive applications expertise in the areas of materials flow, chemical composition, pressure and vacuum technology, power delivery, reactive gas generation and information management. By building this expertise into every MKS product and by combining those products and technologies into integrated subsystems, MKS is able to provide best-in-class solutions that improve productivity and solve process challenges for OEM and end-user customers. MKS is anchored by organizational strength and renowned manufacturing, and offers complete localized technical support to its customers around the world.
Product Lines
Products, Services and Markets
MKS has Customer Support Centers around the world to provide local, fast turnaround service to customers when needed. MKS sales and applications engineers are technically trained to specify the proper equipment solution for a given application. MKS customers recognize MKS for its high level of vacuum technology expertise and for its superior products and services.
To help process, equipment and maintenance engineers optimize their process tools, MKS combines individual components into integrated modules to provide specific process functions that require multiple products working together. Our Integrated Component Subsystems™ are tailored for a variety of different applications and can solve specific tool challenges.
Company Key Products
Instruments & Control Systems – This major product group of MKS combines pressure measurement and control products, flow measurement and control products, gas analysis products, leak detection products, calibration products, and control and information technology products. Specifically, this product group encompasses Baratron® capacitance manometers and pressure transducers; pressure controllers and butterfly pressure control valves; pressure and flow calibration systems; mass flow controllers; gas analysis and process monitoring sensors; and digital control products that manage data communications among digital sensors, control subsystems, host computer systems and the factory network.
Power & Reactive Gas – This major product group of MKS combines the company’s former ENI® and ASTeX® Product Groups, and offers power delivery and reactive gas generation products. Offerings include reactive gas generators and ozonated water delivery subsystems; microwave power supplies; RF power generators; DC and pulsed DC power generators; and impedance matching networks.
Vacuum Products: HPS® Products – This MKS product group manufactures a complete range of HPS® vacuum technology products for the vacuum subsystems that are the foundation of many advanced processing tools, including: vacuum components and valves; a broad range of high vacuum gauges, including compact MEMS-based vacuum transducers; and Effluent Management Subsystems™ for productivity enhancement, utilizing HPS vacuum pumping line heaters and traps.