RIGAKU
Rigaku Innovative Technologies

7A Raymond Avenue, Salem, NH 03079
603/890-6001 Fax 603/890-6016
E-mail davemaho@rigaku.com

David G. Mahoney, President and COO
Walter Helgeland, Technical Director

Web Site http://www.rigaku.com

Company Profile

Rigaku Innovative Technologies, Vacuum Products Division is a US subsidiary of Rigaku, Japan. Rigaku Japan was founded in 1951 to satisfy the domestic and export market for high-quality X-ray analytical instruments. The Vacuum Products Division was founded in 1978 to satisfy the world-wide demand for very high-performance rotary magnetic fluid feedthoughs. Rigaku-USA was established in 1989 to satisfy the needs of the U.S. market for ferrofluid rotary motion feedthroughs. Today, Rigaku designs, manufactures, and rebuilds rotary motion feedthoughs for world-wide support in both Danvers, MA and Tokyo, Japan.

Product Lines

• Rotary motion feedthroughs and seals for vacuum or pressure applications
• Ferrofluids
• Rebuilding service for all makes of magnetic-fluid rotary motion feedthoughs
• Analytical x-ray systems for crystal and materials analysis

Products, Services and Markets

Rigaku Vacuum Products division designs, manufacturers, and rebuilds standard and custom rotary motion feedthoughs for a wide variety of applications. Our standard product line includes hollow and solid shaft feedthoughs from 3/16" to 3", and from 5mm to 75mm. O-ring or metal-sealed flange, threaded nose, threaded body, and bore-mount configurations are available off-the-shelf.

Additional standard features include pre-loaded and cantilever bearings systems, water cooling, all-metal convection cooled ferrofluid feedthroughs for high-temperature-UHV applications, and ferrofluids for UHV and active-gas applications.

Custom designs include modified standard products (housing/shaft modifications), coaxial designs, special materials, cartridge seals, ferrofluid pre-charged seals for sealing directly to the customer’s shaft, dust-exclusion seals and feedthroughs with direct drive brushless DC and AC servo motors built in.

Rigaku’s feedthoughs are used extensively in industrial and semiconductor processing to exclude air contamination and to contain gases within the processing chamber. Processes include sputter coating systems, CVD systems, etch systems, ion implanters, materials handling robots and crystal growing furnaces,. A patented, balanced permanent magnet seal circuit design virtually eliminates stray magnetic fields and allows very high torque transmitting capacity with a 2.5 atmosphere differential pressure capacity as standard.

Company Key Products

Magnaseal Rotary Feedthroughs by Rigaku -- Premium, innovative sealing solutions at very competitive prices. A wide range of catalog products are stocked for immediate delivery, including direct replacement products for competitive ferrofluid feedthroughs. We stock the largest line of metric-based feedthroughs as well. Custom designed units are available for OEM applications.

HotWall UHV-compatible Magnaseal rotary feedthrough -- UHV compatibility is assured with all-metal static sealing and a cantilever, high-capacity bearing system. This rotary motion feedthrough operates at up to 150 degrees Celsius without the need for water cooling.

X-ray Fluorescence spectrometers, Thin film/Semiconductor Wafer Analyzers, TRXRF Spectrometers for thin film/Semiconductor Wafers, Single Crystal Orientation Measurement, X-ray Diffractometers, Rotating Anode X-ray Generators, Radiographic Systems.