1833 Vultee Street
Allentown, PA 18103-4783
610/791-6700 Fax 610/791-0440 sales@shicryogenics.com
Bob
Deobil, Product Manager
Jason Rader, Product Administration Manager
Sarah Mitchell, Marketing Communications Manager
Web Site http://www.shicryogenics.com
Company Profile
Sumitomo (SHI) Cryogenics of America (SCAI), part of the SHI Cryogenics Group, has driven the implementation of cryogenic technology in vacuum applications since the inception of APD Cryogenics in 1959. SHI Cryogenics Group serves customers with facilities around the world, while its renowned engineering departments in the United States and Japan continue to focus on the latest technology drivers for the vacuum market, including innovative cryopump technologies.
Product Lines
Products, Services and Markets
SCAI is recognized for designing and introducing the cryogen-free cryopump in 1975, enabling low-cost, high volume commercial manufacturing of semiconductor and optical devices. Today, Marathon® CP cryopump systems are offered in a variety of sizes and configurations. They are designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies, while their pumping performance remains unsurpassed in the industry. The patented pneumatic actuator design allows them to be readily serviced without the need to break vacuum or remove the cryopump from the chamber, affording users maximum production up-time and low cost of ownership.
In addition to cryopumps, SHI Cryogenics Group manufactures both 4K and 10K cryocoolers, pulse tubes, shield coolers and laboratory cryostats for the semiconductor, research, optical coating and medical industries. As always, SCAI’s customers benefit from performance reliability, leading edge technology and a global sales and support network.
Company Key Products
Marathon® CP Cryopumps
4K and 10K Cryocoolers
Pulse Tubes
Other Offices
| Sunnyvale, CA Tel: 408/736-4406 Fax: 408/736-7325 |
Elk
Grove Village Tel: 847/290-5801 Fax: 847/290-1984 |
Basingstoke,
Hampshire, United Kingdom Tel: 44/1256 853 333 Fax: 44/1256 471 507 |
| Darmstadt, Germany Tel: 49/6151 860 610 Fax: 49/6151 800 252 |
Tokyo, Japan Tel: 81/3-6737-2550 Fax: 81/3-6866-5114
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Shanghai, China Tel: 86/21 6340-3993 Fax: 86/21 6340 3722 |