TRANSFER ENGINEERING AND MANUFACTURING, INC.

47697 Westinghouse Drive, Suite 100, Fremont, CA 94539

510/651-3000 Fax 510/651-3090
E-mail team@transferengineering.com

Web Site http://www.transferengineering.com

Company Profile

Transfer Engineering and Manufacturing is a privately held firm specializing in providing innovative products for OEM, Production Facility and R&D/University Lab customers in the Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning and manipulation of samples, semiconductor wafers, substrates, flat panels and other materials with precision and reliability in UHV, HV, ultra-clean, ultra-dry and other challenging controlled environments. The product line includes MESC Compatible wafer transport systems.

Product Lines

Products, Services and Markets

Transfer Engineering specializes in high performance magnetically-coupled vacuum transfer, positioning and sample conditioning systems along with vacuum loadlocks (single wafer, cassettes and special sizes) for use in high or ultrahigh vacuum or ultra clean environments. We believe the key to providing the best product solution is to listen closely to our customers to understand their process and objectives to ensure that the components we provide accomplishes their goals. A major portion of our business involves modifications to standard products or customized systems.
Products include:
  • Precision Magnetic Manipulators – (various models featuring high magnetic coupling strength with single or double shafts with independent motions)
  • Loadlocks – 200mm & 300mm for cassette or single wafer and special sizes.
  • Custom UHV/HV Systems for R&D – wide range of loadlocks and positioning devices
  • Single to multi-axis motion and placement mechanisms for controlled environments (cleanroom applications, etc.)
  • HV and UHV heating and/or cooling assemblies

Company Key Products

Precision Magnetic Manipulators -- A family of magnetically operated linear, rotary, and linear/rotation sample manipulation systems for HV and UHV. All PMMs can be readily motorized. Models include:
Standard & High-Load PMM s- with patented independent linear/rotary motion
PMM-Lite & PMM Compact - cost effective/reduced size solutions
Rotary-Only - for precise rotation within a sealed chamber. Eliminates bellows or “fluidic” feedthroughs.

Loadlock Systems -- Manual and motorized loadlock systems are available for transfer into analytical or process chambers without venting the chamber to atmospheric pressure.
MASCOT – MESC Compatible Loadlock System for single wafer or large sample provides the capability to load wafers manually or automatically into a MESC-standard process module without breaking vacuum

TEAM-Mate – Semi-Automated, Small Footprint, Magnetically-coupled Loadlock System for single wafer or cassette with MESC-compatible or custom interface
Loadlock Upgrades for Analytical Deposition Systems – Upgrades for PHI 500 Series XPS/600 Series
Expanded SEM Loadlocks – Cost-effective upgrade allows 150 mm wafer into a 100 mm FE-SEM.

Transferable Experimental Pucks with UHV Banana Plugs -- Versatile sample transfer and processing systems with UHV-compatible electrical connectors.

Custom UHV/HV Systems for R&D -- Wide range of sample loadlocks and positioning devices for developmental sputter systems, synchrotron end-stations, chemical and bio-tech, opto-electrical, materials, wafer and flat panel display and other high-tech industries.