2901 Eisenhower Street,
Carrollton, TX 75007

972/446-9990 FAX 972/446-9586
E-mail jwelch@verityinst.com

Mike Whelan, President
John Welch, Director of Sales & Marketing

Web Site http://www.verityinst.com

Company Profile

Verity Instruments, Inc., is an instrument manufacturer specializing in optical-based instruments and software applications for endpoint, advanced process control, and metrology. Products include optical emission sensors, spectrometers and spectral reflectometers. Verity is a privately held Texas corporation, founded in 1978.

The company's first product line included sensors and controls to measure moisture content in organic fibers. In 1980 Verity shifted its emphasis to the semiconductor industry by introducing a portable spectrograph for the analysis of plasma emissions. This product was followed shortly by a monochromator system for detecting process optical endpoints.

Product Lines

• Optical Emissions Detectors/Controllers
• Spectral Reflectometers

Products, Services and Markets

Verity's products include a wide range of optical emission detectors including high performance  optical emission spectrometers (OES) and reflectometers. The primary focus for the OES products is on vacuum plasma applications. The reflectometer products' primary focus is on metrology applications. Products are sold worldwide for production, research, and education applications.

OES products are used in a variety of applications including endpoint, process development, plasma diagnostics, and process control. Verity supplies OES products including spectrographs, monochromators, and interference filter-based detectors. The SD1024 spectrograph features a back-thinned 1024-element CCD detector array, which enables simultaneous measurement of all wavelengths from 200 to 800 nm. Photomultiplier tube-based monochromators are high-performance instruments for analyzing a single wavelength. The compact, cost-effective interference filter-based detectors use either a silicon diode or photomultiplier tube as a detector. This broad range of instruments allows Verity to supply customers with the level of performance required for their application.

The development of advanced signal processing algorithms has permitted Verity to offer solutions for low-exposed area endpoint and other complex signal processing applications. Advanced software applications include proprietary pattern recognition (neural network) software and multi-wavelength analysis (used with the spectrograph) software.

Company Key Products

Spectral Reflectometer -- The SP2006 provides real-time, in-situ or in-line film transition and/or film thickness determination. The SP2006 is designed for in-situ and in-line measurement of films in etch, and CVD applications and for metal or transition breakthrough in CMP.

Monochromators -- EP200 Series are high-performance monochromators with integral photomultiplier tube and electronics. This series interfaces with the high-performance VM3000 Series data acquisition system.

Detectors -- PD and PM Series are compact, low-cost sensors that use interference filters and silicon diode or photomultiplier tube sensors.

Data Acquisition Systems – The VM3000 Series Industrial Computers are data acquisition/process control systems that interface with the EP200 Series monochromators and PD/PM Series detectors. They can be integrated into a process tool and include a multi-chamber, multi-tasking Windows 2000 application called ScanView IV. This intuitive, feature-rich application provides users with Verity's proprietary Neural Net pattern recognition endpoint software, as well as traditional numerical, recipe-based, trend-analysis algorithms.