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1755 E. Bayshore Road, Suite 17, Redwood City, CA 94063
Ronald Vane, President Web Site: www.Evactron.com |
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1755 E. Bayshore Road, Suite 17, Redwood City, CA 94063
Ronald Vane, President Web Site: www.Evactron.com |
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Company Profile
XEI Scientific, Inc. makes the Evactron RF Plasma Cleaners (De-Contaminators) and Low Power RF Generators. The Evactron De-Contaminator is the world leader in RF Plasma ashing for carbon contamination removal in electron microscopes and other vacuum chambers. The Evactron D-C uses a unique RF plasma source to make Oxygen radicals from air for downstream plasma ashing of the hydrocarbons and carbon deposits found in vacuum chambers. Clean chambers up to 300 liters quickly. Safe and compliant to CE, RoHS, c NRTL us, and SEMI –S2. Five year limited warranty for free factory repairs done overnight.Product Lines
Products, Services and Markets
Hydrocarbon
free vacuum enables many new technologies and improves the performance
of others. The Evactron De-Contaminator was originally developed to
clean electron microscopes for better images in 1999. Over 800 systems
have been sold for this application alone. Today there are new vacuum
processes that need carbon free vacuum such as EUV lithography, electron
spectroscopy, and surface analysis.
The
Evactron D-C oxidizes carbon compounds with oxygen radicals made from
air in a remote RF plasma Oxygen radical Source (ORS). The oxygen
radicals and the oxidation products flow from the ORS though the vacuum
chamber towards the pump. The
removal of carbon from the vacuum prevents the deposition of carbon in
areas scanned by electron and ion beams or lasers and UV light.
