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AVEM Seminar Abstracts
2006
| 2005 | 2004
| 2003 | 2001 | 2000
1999 | 1998 | 1997
| 1996 | 1995
Behavior
of Vacuum Equipment within Radioactive and Magnetic Environments
Dieter Mueller, Leybold Vacuum, Cologne, Germany
Overview
of Applications of Vacuum Technology Required for the World’s
most Powerful Laser System - NIF
Peter Biltoft, Lawrence Livermore National Laboratory,
Livermore, CA
A
Year in Review for the Semiconductor Equipment and Materials
Market and Trends Moving Forward
Lara Chamness, Semiconductor Materials and Equipment
International (SEMI), San Jose, CA
Slide
presentation.
Front
End Process Directions in the 2005 ITRS
Larry A. Larson, SEMATECH, Austin, TX
Slide
presentation.
EUV
Lithography: Vacuum Challenges
Paul Blackborow, Energetiq Technology, Inc., Woburn, MA
What
Makes a Vacuum Product Successful?
Gerardo A. Brucker, Stanford Research Systems, Inc.,
Sunnyvale, CA
Forecast
of the Next Turning-Point in Demand for Equipment Components
Moshe Handelsman and Rosa Luis, Advanced Forecasting,
Cupertino, CA
Quadrupole
Mass Spectrometry Applications in Residual Gas Analysis and
Production Control for Semiconductor Processing and
Fabrication
Mark Buckley, Hiden Analytical Inc., Plymouth, MI
State
of the Art and Industry Demands for Magnetron Sputter
Technologies
Dermot Monaghan, Gencoa Ltd.
The
Semiconductor Manufacturing Industry
Current Status and Future Outlook
Lubab Sheet, Semiconductor Equipment and Materials
International (SEMI)
Vacuum
Equipment in the Data Storage Industry
Dr. Art Wall, Hitachi Global Storage Technologies
Pressure
& Residual Gas Control In Plasma!
Harry Grover, MeiVac Inc. and Nir GurArye of Ricor
The
Semiconductor Industry: Current Status and Future Outlook
Lubab Sheet, Semiconductor Equipment and Materials
International (SEMI)
Working
Under Pressure: the Promise of Supercritical Co2
Fluids for Microelectronic Applications
Chris Case, BOC Edwards
Designing
for Optimum Dynamic Performance in Vacuum Environments
Kenneth J. Christensen, Motion in Vacuum
Recent
Technical Advances in Pulsed Laser Deposition (PLD)
Tetsuo Ishida, Vacuum Products Corporation
International
SEMATECH and its approach to New Transistor Materials and
Device Directions
Larry Larson, SEMATECH
Opening Remarks by the AVS
President-Elect:
Paddling Upstream
Rudy Ludeke, IBM T.J. Watson Research Center
Japanese
Vacuum Industry Trends and JVIA Activities
Tadeo Sumi, Chairman, Japan Vacuum Industry Association (JVIA),
and President, Shibaura Mechatronics Corporation
Semiconductor
Capital Equipment Trends and Outlook
Elizabeth Schumann, Director,
Industry Research and Statistics, SEMI
Cathodic
Arc Plasma Deposition: Principles and Trends
André Anders, Lawrence
Berkeley National Laboratory, University of California,
Berkeley, CA
Innovative
Trends in Selective Pumping
Lawrence T. Lamont, Jr., Cougar
Labs, Inc., Fremont, CA
The
Perils of "Double Bookings"
The presentation of Dr. Moshe
Handelsman at AVEM (Oct. 30, 2001) was based on the following
article.
Opening
Remarks by the AVS President-Elect
Bruce D. Sartwell, Naval Research Laboratory
Advances
in Uncooled Thermal Imaging and the Need for High-Throughput
Vacuum Packaging
S. Jamison, K. Galli, and K. Ryan, Sanders IR Imaging Systems
Automated
Fabrication of OLED Flat Panel Displays
T. K. Hatwar and G. Rajeswaran, Display Technology Laboratory, Eastman
Kodak Company
Advanced
Applications of Ion Implantation and Their Impacts on Vacuum
Technology
L. Rubin, Axcelis Technologies
Lean
Thinking for the Vacuum Industry
J. P. Womack, The Lean Enterprise Institute
Performance
Limits in Gigascale Interconnect Schemes—Challenges and
Potential Solutions
Alain E. Kaloyeros, Michael Belyansky, James Castracane,
Katherine Dovidenko, Eric T. Eisenbraun, Robert Geer, Serge
Oktyabrsky, John Welch, and Di Wu, UAlbany Institute for
Materials and the Physics and Chemistry Departments, The
University at Albany-SUNY
The
Present Status and Future of the Japanese Vacuum Equipment
Market
Shunji Nishihira, Chairperson,
Japan Vacuum Industry Association (JVIA)
Market
Segment Focus—OEM/End-User in the Analytical Instrument
Industry
Gregory Wells, Varian Analytical Instruments, Varian Inc.
Market
Segment Focus—Industrial Optical Coating Industry
Russell J. Hill and Gregg Wallace, BOC Coating Technology
Market
Segment Focus—Data Storage Industry
Andrew C. Walker, IBM Storage Systems Division
Market
Segment Focus—Flat Panel Display Industry
J. Norman Bardsley, Lawrence Livermore National Laboratory
and the United States Display Consortium
Message
from the 1999 AVS President-Elect
Paula Grunthaner, Jet Propulsion Laboratory
1998 AVEM Seminar
Market
Overview of the Semiconductor Equipment and Materials Industry
and the Impact of Globalization,Victoria
Hadfield, Vice President, Public Policy and North America, SEMI
Evolution of the Vacuum Industry: The Shift From Components to Subsystems, Christopher Moody, Senior Vice President, Helix Technology Corporation
IC Price "Deflation" Staggers 1998 Semiconductor Market, Bill McClean, President, IC Insights, Inc.
Semiconductor
Support: The Times Have Changed, James E. White, Global
Logistics Manager,
Varian Semiconductor Equipment Customer Support
1997 AVEM Seminar
The Coming Revolution in IC's: Intelligent, Integrated Microsystems, A.D. Romig, Jr.; Director, Microelectronics and Photonics, and J.H. Smith; Team Leader, Intelligent Micromachine Technology, Sandia National Laboratories
Smarter Tools by Design,Alexander M. Voshchenkov, Chief Technical Officer, Lam Research Corporation
IC Defects and Future Vacuum Needs for the Semiconductor Industry, Sattar Allami, Section Head, Thin Film Department, Integrated Device Technology
Compacted Change in Interconnect Technology and its Implications for Vacuum Equipment Manufacturers, Ron Dornseif, Dataquest, Semiconductor Equipment, Manufacturing and Materials Service
Semiconductor Equipment Industry in 1996 and Beyond, Richard Greene, SEMI
Less is More - some IC, Process and Equipment Trends, Christopher Case, Lucent Technologies
Paradigm Shifts and Economies of Scale in the 300mm Semiconductor Equipment Markets, Charles M. McKenna, Varian Ion Impant Systems
AVS - Contributions to the Semiconductor Industry, William D. Sproul, BIRL Northwestern University
Vacuum Pumping Trends in the Semiconductor Industry, Alan P. Troup & Stephen Kew, The BOC Group
Present and Future Trends of the US Vacuum Industry, Joel McFadden, Stokes Vacuum, Inc.
Life Beyond Semiconductors, William D. Sproul, BIRL, Northwestern University
Equipment Needs for Future Generations of Flat Panel Displays, Todd Yuzuriha, Sharp Microelectronics Technology, Inc.
Vacuum
Applications in the Manufacture of Liquid Crystal Displays, Mark
Fochs, Standish Industries, Inc.
Cost
Considerations in Active Matrix Liquid Crystal Displays, Kenji
Miyata, Hitachi Ltd., Japan